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"Mirror Surface Finishing of Silicon Wafer Edge Using Ultrasonic Assisted ..."
Yongbo Wu et al. (2013)
- Yongbo Wu, Weiping Yang, Masakazu Fujimoto, Libo Zhou:
Mirror Surface Finishing of Silicon Wafer Edge Using Ultrasonic Assisted Fixed-Abrasive CMP (UF-CMP). Int. J. Autom. Technol. 7(6): 663-670 (2013)
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