"Thin Silicon Structures Fabrication By Wet Anisotropic Etching."

Ajay Agarwal et al. (2003)

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DOI: 10.1142/S1465876303001150

access: closed

type: Journal Article

metadata version: 2020-07-09

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Ajay Agarwal, Xiao Lin Zhang, Terence Gan, Janak Singh:
Thin Silicon Structures Fabrication By Wet Anisotropic Etching. Int. J. Comput. Eng. Sci. 4(2): 311-314 (2003)

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