"Analysis And Comparison Of Flexure Structures Used In 3-D Electrostatic ..."

Bangtao Chen, Jianmin Miao, Hong Zhu (2003)

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DOI: 10.1142/S1465876303000958

access: closed

type: Journal Article

metadata version: 2020-07-09

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Bangtao Chen, Jianmin Miao, Hong Zhu:
Analysis And Comparison Of Flexure Structures Used In 3-D Electrostatic Microactuators For Hard Disk Drives. Int. J. Comput. Eng. Sci. 4(2): 227-230 (2003)

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