"Impact Of Deposition Parameters On The Characterizations Of Highly ..."

Ning Jiang et al. (2003)

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DOI: 10.1142/S1465876303001721

access: closed

type: Journal Article

metadata version: 2020-07-09

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  - https://dblp.org/rec/journals/ijces/JiangSFWW03
Ning Jiang, Rajnish K. Sharma, Hanhua Feng, Zhe Wang, Xiaowei Wang:
Impact Of Deposition Parameters On The Characterizations Of Highly Orientated Aluminum Nitride For Film Bulk Acoustic Resonator Device. Int. J. Comput. Eng. Sci. 4(3): 547-550 (2003)

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