"Hot Embossing For Mems Using Silicon Tools."

Matthias Küchler et al. (2003)

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DOI: 10.1142/S1465876303001873

access: closed

type: Journal Article

metadata version: 2020-07-09

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  - journals/ijces/KuchlerOGES03
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  - https://dblp.org/rec/journals/ijces/KuchlerOGES03
Matthias Küchler, Thomas Otto, Thomas Gessner, Frank Ebling, Henning Schröder:
Hot Embossing For Mems Using Silicon Tools. Int. J. Comput. Eng. Sci. 4(3): 609-612 (2003)

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