"Fabrication Of Ultrahigh-Density Nano-Pyramid Arrays (Npas) On (100) ..."

Jeng T. Sheu et al. (2003)

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DOI: 10.1142/S1465876303002076

access: closed

type: Journal Article

metadata version: 2020-07-09

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Jeng T. Sheu, Cheng C. Chen, Sun P. Yeh, Hseih T. Chou:
Fabrication Of Ultrahigh-Density Nano-Pyramid Arrays (Npas) On (100) Silicon Wafer Using Scanning Probe Lithography And Anisotropic Wet Etching. Int. J. Comput. Eng. Sci. 4(3): 695-698 (2003)

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