"Fabrication Of Amorphous Carbon Micro-Membranes By Deep Reactive Ion ..."

Liujiang Yu et al. (2003)

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DOI: 10.1142/S1465876303001800

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type: Journal Article

metadata version: 2020-07-09

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Liujiang Yu, B. K. Tay, D. Sheeja, Y. Q. Fu, Jianmin Miao:
Fabrication Of Amorphous Carbon Micro-Membranes By Deep Reactive Ion Etching Technique. Int. J. Comput. Eng. Sci. 4(3): 581-584 (2003)

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