"Micromachining Process Of Piezoelectric Microcantilever Using Pzt Thin Film."

Hong Zhu et al. (2003)

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DOI: 10.1142/S1465876303001630

access: closed

type: Journal Article

metadata version: 2020-07-09

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Hong Zhu, Jianmin Miao, Bangtao Chen, Zhihong Wang, Weiguan Zhu:
Micromachining Process Of Piezoelectric Microcantilever Using Pzt Thin Film. Int. J. Comput. Eng. Sci. 4(3): 509-512 (2003)

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