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"Wafer sojourn time fluctuation analysis for time-constrained dual-arm ..."

Fajun Yang et al. (2021)

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DOI: 10.1080/0951192X.2020.1718767

access: closed

type: Journal Article

metadata version: 2021-12-22

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  - journals/ijcim/YangWQSZ21
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  - https://dblp.org/rec/journals/ijcim/YangWQSZ21
Fajun Yang, Naiqi Wu, Yan Qiao, Rong Su, Chunjiang Zhang:
Wafer sojourn time fluctuation analysis for time-constrained dual-arm multi-cluster tools with activity time variation. Int. J. Comput. Integr. Manuf. 34(7-8): 734-751 (2021)

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