"Cycle time simulation study for cluster tool operation in IC fabrication."

Amit Kumar Gupta, Appa Iyer Sivakumar, Peter Lendermann (2011)

> Home

Details and statistics

DOI: 10.1504/IJMTM.2011.045508

access: closed

type: Journal Article

metadata version: 2020-06-04

- view
  - electronic edition via DOI
  - unpaywalled version
  authority control:
- export record
  dblp key:
  - journals/ijmtm/GuptaSL11
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/journals/ijmtm/GuptaSL11
Amit Kumar Gupta, Appa Iyer Sivakumar, Peter Lendermann:
Cycle time simulation study for cluster tool operation in IC fabrication. Int. J. Manuf. Technol. Manag. 23(3/4): 179-192 (2011)

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.