"Analysing semiconductor manufacturing big data for root cause detection of ..."

Chen-Fu Chien, Chiao-Wen Liu, Shih-Chung Chuang (2017)

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DOI: 10.1080/00207543.2015.1109153

access: closed

type: Journal Article

metadata version: 2021-04-09

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Chen-Fu Chien, Chiao-Wen Liu, Shih-Chung Chuang:
Analysing semiconductor manufacturing big data for root cause detection of excursion for yield enhancement. Int. J. Prod. Res. 55(17): 5095-5107 (2017)

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