"Scheduling of multiple in-line steppers for semiconductor wafer fabs."

Chie-Wun Chiou, Muh-Cherng Wu (2014)

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DOI: 10.1080/00207721.2012.724093

access: closed

type: Journal Article

metadata version: 2020-07-22

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Chie-Wun Chiou, Muh-Cherng Wu:
Scheduling of multiple in-line steppers for semiconductor wafer fabs. Int. J. Syst. Sci. 45(3): 384-398 (2014)

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