"Row-structure stencil planning approaches for E-beam lithography with ..."

Jian Kuang, Evangeline F. Y. Young (2016)

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DOI: 10.1016/J.VLSI.2016.07.002

access: closed

type: Journal Article

metadata version: 2020-02-20

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Jian Kuang, Evangeline F. Y. Young:
Row-structure stencil planning approaches for E-beam lithography with overlapped characters. Integr. 55: 232-245 (2016)

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