"A TCAD system for VLSI implementation of the CVD process using VHDL."

Georgios Ch. Sirakoulis (2004)

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DOI: 10.1016/J.VLSI.2003.11.001

access: closed

type: Journal Article

metadata version: 2020-02-20

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Georgios Ch. Sirakoulis:
A TCAD system for VLSI implementation of the CVD process using VHDL. Integr. 37(1): 63-81 (2004)

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