"Semi-supervised lithography hotspot detection based on feature fusion and ..."

Hui Xu et al. (2025)

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DOI: 10.1016/J.VLSI.2025.102472

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type: Journal Article

metadata version: 2025-08-07

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Hui Xu, Xinzhong Xiao, Wenxin Huang, Ruijun Ma, Fuxin Tang, Pan Qi, Ye Yuan, Huaguo Liang:
Semi-supervised lithography hotspot detection based on feature fusion and residual attention. Integr. 104: 102472 (2025)

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