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"Intensity Difference Map (IDM) Accuracy Analysis for OPC Efficiency ..."

Ahmed Awad et al. (2017)

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DOI: 10.2197/IPSJTSLDM.10.28

access: closed

type: Journal Article

metadata version: 2023-05-01

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Ahmed Awad, Atsushi Takahashi, Satoshi Tanaka, Chikaaki Kodama:
Intensity Difference Map (IDM) Accuracy Analysis for OPC Efficiency Verification and Further Enhancement. IPSJ Trans. Syst. LSI Des. Methodol. 10: 28-38 (2017)

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