"An Optical Coordinate Measuring Machine for Nanoscale Dimensional Metrology."

Eric Kirkland, Thomas R. Kurfess, Steven Y. Liang (2004)

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DOI: 10.20965/JACIII.2004.P0039

access: open

type: Journal Article

metadata version: 2021-02-16

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Eric Kirkland, Thomas R. Kurfess, Steven Y. Liang:
An Optical Coordinate Measuring Machine for Nanoscale Dimensional Metrology. J. Adv. Comput. Intell. Intell. Informatics 8(1): 39-44 (2004)

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