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"Investigation of MEMS Single Turn Meander-Shaped Silicon Carbide ..."
Dadasikandar Kanekal, Sumit Kumar Jindal (2024)
- Dadasikandar Kanekal
, Sumit Kumar Jindal
:
Investigation of MEMS Single Turn Meander-Shaped Silicon Carbide Piezoresistive Pressure Sensor on a Clamped Circular Diaphragm for High Pressure Harsh Environment Applications. J. Circuits Syst. Comput. 33(4): 2450065:1-2450065:17 (2024)
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