"Improved algorithm for automated alignment of wafers via optimized ..."

Michael Parshin, Zeev Zalevsky (2009)

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DOI: 10.1117/1.3243882

access: closed

type: Journal Article

metadata version: 2017-05-28

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Michael Parshin, Zeev Zalevsky:
Improved algorithm for automated alignment of wafers via optimized features location. J. Electronic Imaging 18(4): 043001 (2009)

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