"Wafer map defect recognition based on multi-scale feature fusion and ..."

Shouhong Chen et al. (2025)

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DOI: 10.1007/S10845-023-02231-Z

access: closed

type: Journal Article

metadata version: 2025-05-01

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Shouhong Chen, Zhentao Huang, Tao Wang, Xingna Hou, Jun Ma:
Wafer map defect recognition based on multi-scale feature fusion and attention spatial pyramid pooling. J. Intell. Manuf. 36(1): 271-284 (2025)

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