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"An empirical study of design-of-experiment data mining for yield-loss ..."

Chen-Fu Chien, Kuo-Hao Chang, Wen-Chih Wang (2014)

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DOI: 10.1007/S10845-013-0791-5

access: closed

type: Journal Article

metadata version: 2023-06-26

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Chen-Fu Chien, Kuo-Hao Chang, Wen-Chih Wang:
An empirical study of design-of-experiment data mining for yield-loss diagnosis for semiconductor manufacturing. J. Intell. Manuf. 25(5): 961-972 (2014)

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