"Virtual metrology for chemical mechanical planarization of semiconductor ..."

Balamurugan Deivendran et al. (2025)

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DOI: 10.1007/S10845-024-02335-0

access: closed

type: Journal Article

metadata version: 2025-04-08

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Balamurugan Deivendran, Vishnu Swaroopji Masampally, Naga Ravikumar Varma Nadimpalli, Venkataramana Runkana:
Virtual metrology for chemical mechanical planarization of semiconductor wafers. J. Intell. Manuf. 36(3): 1923-1942 (2025)

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