"Novel method for detection of mixed-type defect patterns in wafer maps ..."

Tae San Kim et al. (2022)

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DOI: 10.1007/S10845-021-01755-6

access: closed

type: Journal Article

metadata version: 2022-07-25

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Tae San Kim, Jong Wook Lee, Won Kyung Lee, So Young Sohn:
Novel method for detection of mixed-type defect patterns in wafer maps based on a single shot detector algorithm. J. Intell. Manuf. 33(6): 1715-1724 (2022)

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