"Recurrent feature-incorporated convolutional neural network for virtual ..."

Ki Bum Lee, Chang Ouk Kim (2020)

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DOI: 10.1007/S10845-018-1437-4

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type: Journal Article

metadata version: 2025-01-19

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Ki Bum Lee, Chang Ouk Kim:
Recurrent feature-incorporated convolutional neural network for virtual metrology of the chemical mechanical planarization process. J. Intell. Manuf. 31(1): 73-86 (2020)

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