"Subpixel keypoint localization and angle prediction for lithography marks ..."

Yulong Li et al. (2025)

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DOI: 10.1007/S10845-024-02400-8

access: closed

type: Journal Article

metadata version: 2025-08-05

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Yulong Li, Yangjie Cao, Shijiao Li, Hui Tian, Guochen Qi, Ronghan Wei:
Subpixel keypoint localization and angle prediction for lithography marks based on deep learning. J. Intell. Manuf. 36(6): 3843-3868 (2025)

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