"Using genetic algorithm to optimize the dummy filling problem of the flash ..."

S. C. Lin, Shu Fan Liu, Fei Long Chen (2012)

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DOI: 10.1007/S10845-010-0429-9

access: closed

type: Journal Article

metadata version: 2023-05-16

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S. C. Lin, Shu Fan Liu, Fei Long Chen:
Using genetic algorithm to optimize the dummy filling problem of the flash lamp anneal process in semiconductor manufacturing. J. Intell. Manuf. 23(3): 775-785 (2012)

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