Stop the war!Остановите войну!
for scientists:
default search action
Google
Google Scholar
Semantic Scholar
Internet Archive Scholar
CiteSeerX
ORCID"Fault Detection in the Semiconductor Etch Process Using the Seasonal ..."
Muhammad Zeeshan Arshad, Javeria Muhammad Nawaz, Sang Jeen Hong (2014)
- Muhammad Zeeshan Arshad, Javeria Muhammad Nawaz, Sang Jeen Hong:
Fault Detection in the Semiconductor Etch Process Using the Seasonal Autoregressive Integrated Moving Average Modeling. J. Inf. Process. Syst. 10(3): 429-442 (2014)
a service of 
manage site settings
To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.
last updated on 2021-02-16 15:58 CET by the dblp team
all metadata released as open data under CC0 1.0 license
see also: Terms of Use | Privacy Policy | Imprint
dblp was originally created in 1993 at:
since 2018, dblp has been operated and maintained by:
the dblp computer science bibliography is funded and supported by:
