"Load Balancing Among Photolithography Machines in the Semiconductor ..."

Arthur M. D. Shr, Alan Liu, Peter P. Chen (2008)

> Home

Details and statistics

DOI: —

access: closed

type: Journal Article

metadata version: 2021-07-16

- view
  - electronic edition @ sinica.edu.tw (archived)
  - lookup Internet Archive Scholar
- export record
  dblp key:
  - journals/jise/ShrLC08
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/journals/jise/ShrLC08
Arthur M. D. Shr, Alan Liu, Peter P. Chen:
Load Balancing Among Photolithography Machines in the Semiconductor Manufacturing System. J. Inf. Sci. Eng. 24(2): 379-391 (2008)

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.