"Helium focused ion beam damage in silicon: Physics-informed neural network ..."

Shupeng Gao et al. (2025)

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DOI: 10.1016/J.JOCS.2025.102696

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type: Journal Article

metadata version: 2025-09-16

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Shupeng Gao, Qi Li, Miguel A. Gosálvez, Xi Lin, Yan Xing, Zaifa Zhou, Qianhuang Chen:
Helium focused ion beam damage in silicon: Physics-informed neural network modeling of helium bubble nucleation and early growth. J. Comput. Sci. 92: 102696 (2025)

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