"Transformation and Mechanical Properties of TiNi Thin Films Sputter ..."

Seiji Shimizu, Katsutoshi Kuribayashi (1999)

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DOI: 10.20965/JRM.1999.P0258

access: closed

type: Journal Article

metadata version: 2020-04-01

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Seiji Shimizu, Katsutoshi Kuribayashi:
Transformation and Mechanical Properties of TiNi Thin Films Sputter Deposited at Various Argon Pressures for Micromachine Actuators. J. Robotics Mechatronics 11(4): 258-262 (1999)

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