"Experiments on the Release of CMOS-Micromachined Metal Layers."

Daniel Fernández, Jordi Ricart, Jordi Madrenas (2010)

> Home

Details and statistics

DOI: 10.1155/2010/937301

access: open

type: Journal Article

metadata version: 2024-10-06

- view
  - electronic edition via DOI (open access)
  authority control:
- export record
  dblp key:
  - journals/js/FernandezRM10
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/journals/js/FernandezRM10
Daniel Fernández, Jordi Ricart, Jordi Madrenas:
Experiments on the Release of CMOS-Micromachined Metal Layers. J. Sensors 2010: 937301:1-937301:7 (2010)

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.