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"Ta₂O₅ Thin Films for Capacitive RF MEMS Switches."

Anna Persano et al. (2010)

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DOI: 10.1155/2010/487061

access: open

type: Journal Article

metadata version: 2021-10-14

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Anna Persano, Fabio Quaranta, Adriano Cola, Antonietta M. Taurino, Giorgio De Angelis, Romolo Marcelli, Pietro Siciliano:
Ta₂O₅ Thin Films for Capacitive RF MEMS Switches. J. Sensors 2010: 487061:1-487061:5 (2010)

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