"Continuous-Time Modeling and Analysis of Particle Beam Metrology."

Akshay Agarwal, Minxu Peng, Vivek K. Goyal (2023)

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DOI: 10.1109/JSAIT.2023.3283911

access: closed

type: Journal Article

metadata version: 2024-07-26

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Akshay Agarwal, Minxu Peng, Vivek K. Goyal:
Continuous-Time Modeling and Analysis of Particle Beam Metrology. IEEE J. Sel. Areas Inf. Theory 4: 61-74 (2023)

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