BibTeX record journals/jssc/LakdawalaZLSCF02

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@article{DBLP:journals/jssc/LakdawalaZLSCF02,
  author       = {Hasnain Lakdawala and
                  Xu Zhu and
                  Hao Luo and
                  Suresh Santhanam and
                  L. Richard Carley and
                  Gary K. Fedder},
  title        = {Micromachined high-Q inductors in a 0.18-{\(\mu\)}m copper interconnect
                  low-k dielectric {CMOS} process},
  journal      = {{IEEE} J. Solid State Circuits},
  volume       = {37},
  number       = {3},
  pages        = {394--403},
  year         = {2002},
  url          = {https://doi.org/10.1109/4.987092},
  doi          = {10.1109/4.987092},
  timestamp    = {Sat, 09 Apr 2022 12:27:00 +0200},
  biburl       = {https://dblp.org/rec/journals/jssc/LakdawalaZLSCF02.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}