"A Sub-5mW Monolithic CMOS-MEMS Thermal Flow Sensing SoC With ±6 m/s ..."

Wei Xu et al. (2024)

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DOI: 10.1109/JSSC.2023.3314765

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type: Journal Article

metadata version: 2024-09-08

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Wei Xu, Zhijuan Li, Zetao Fang, Bo Wang, Linze Hong, Gai Yang, Su-Ting Han, Xiaojin Zhao, Xiaoyi Wang:
A Sub-5mW Monolithic CMOS-MEMS Thermal Flow Sensing SoC With ±6 m/s Linear Range. IEEE J. Solid State Circuits 59(5): 1486-1496 (2024)

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