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"Microfabrication technology for non-coplanar resonant beams and crab-leg ..."

Jianqiang Han et al. (2013)

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DOI: 10.1631/JZUS.C1200251

access: closed

type: Journal Article

metadata version: 2020-05-13

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  - https://dblp.org/rec/journals/jzusc/HanFLLL13
Jianqiang Han, Ri-sheng Feng, Yan Li, Sen-lin Li, Qing Li:
Microfabrication technology for non-coplanar resonant beams and crab-leg supporting beams of dual-axis bulk micromachined resonant accelerometers. J. Zhejiang Univ. Sci. C 14(1): 65-74 (2013)

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