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"Modeling and noise analysis of a fence structure micromachined capacitive ..."

Xia Zhang et al. (2010)

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DOI: 10.1631/JZUS.C0910757

access: closed

type: Journal Article

metadata version: 2023-01-19

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Xia Zhang, Hao Wang, Xudong Zheng, Shi-chang Hu, Zhong-he Jin:
Modeling and noise analysis of a fence structure micromachined capacitive accelerometer system. J. Zhejiang Univ. Sci. C 11(12): 1009-1015 (2010)

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