"Advanced manufacturing equipment: a vertical batch furnace for 300-mm ..."

Albert Hasper et al. (1999)

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DOI: 10.1109/40.798107

access: closed

type: Journal Article

metadata version: 2017-05-20

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Albert Hasper, Ed Oosterlaken, Frank Huussen, Tanja Claasen-Vujcic:
Advanced manufacturing equipment: a vertical batch furnace for 300-mm wafer processing. IEEE Micro 19(5): 34-43 (1999)

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