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"Stacked Integration of MEMS on LSI."

Name: dblp XML data dump
Creator: Schloss Dagstuhl - Leibniz Center for Informatics
Published: 1993
License: https://creativecommons.org/publicdomain/zero/1.0/
Keywords: dblp, XML, computer science, scholarly publications, metadata

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Masayoshi Esashi, Shuji Tanaka (2016)

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DOI: 10.3390/MI7080137

access: open

type: Journal Article

metadata version: 2020-05-30

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Masayoshi Esashi, Shuji Tanaka:
Stacked Integration of MEMS on LSI. Micromachines 7(8): 137 (2016)

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last updated on 2020-05-30 19:51 CEST by the dblp team

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