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"In-Situ Testing of the Thermal Diffusivity of Polysilicon Thin Films."

Yifan Gu et al. (2016)

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DOI: 10.3390/MI7100174

access: open

type: Journal Article

metadata version: 2020-05-30

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  dblp key:
  - journals/micromachines/GuZSLH16
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  persistent URL:
  - https://dblp.org/rec/journals/micromachines/GuZSLH16
Yifan Gu, Zai-Fa Zhou, Chao Sun, Wei-Hua Li, Qing-An Huang:
In-Situ Testing of the Thermal Diffusivity of Polysilicon Thin Films. Micromachines 7(10): 174 (2016)

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