"SU-8 Photolithography as a Toolbox for Carbon MEMS."

Rodrigo Martinez-Duarte (2014)

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DOI: 10.3390/MI5030766

access: open

type: Journal Article

metadata version: 2018-08-14

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Rodrigo Martinez-Duarte:
SU-8 Photolithography as a Toolbox for Carbon MEMS. Micromachines 5(3): 766-782 (2014)

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