"Optimized SU-8 Processing for Low-Cost Microstructures Fabrication without ..."

Vânia C. Pinto et al. (2014)

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DOI: 10.3390/MI5030738

access: open

type: Journal Article

metadata version: 2020-03-27

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Vânia C. Pinto, Paulo J. Sousa, Vanessa F. Cardoso, Graça Minas:
Optimized SU-8 Processing for Low-Cost Microstructures Fabrication without Cleanroom Facilities. Micromachines 5(3): 738-755 (2014)

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