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"SU-8 Electrothermal Actuators: Optimization of Fabrication and Excitation ..."

Thomas Winterstein et al. (2014)

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DOI: 10.3390/MI5041310

access: open

type: Journal Article

metadata version: 2023-10-04

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  - journals/micromachines/WintersteinSNFVS14
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  - https://dblp.org/rec/journals/micromachines/WintersteinSNFVS14
Thomas Winterstein, Matthias Staab, Christian Nakic, Hans-Jürgen Feige, Jürgen Vogel, Helmut F. Schlaak:
SU-8 Electrothermal Actuators: Optimization of Fabrication and Excitation for Long-Term Use. Micromachines 5(4): 1310-1322 (2014)

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