"Crystallographic structure and surface composition of NbNx thin ..."

José Edgar Alfonso et al. (2008)

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DOI: 10.1016/J.MEJO.2008.01.027

access: closed

type: Journal Article

metadata version: 2024-09-20

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José Edgar Alfonso, Jaime Buitrago, Jaime Torres, Benito Santos, J. F. Marco:
Crystallographic structure and surface composition of NbN_x thin films grown by RF magnetron sputtering. Microelectron. J. 39(11): 1327-1328 (2008)

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