"High-Q multi-frequency ring-shaped piezoelectric MEMS resonators."

Fei-Hong Bao et al. (2020)

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DOI: 10.1016/J.MEJO.2020.104733

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type: Journal Article

metadata version: 2025-03-03

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Fei-Hong Bao, Qi-Die Wu, Xin Zhou, Ting Wu, Xin-Yi Li, Jingfu Bao:
High-Q multi-frequency ring-shaped piezoelectric MEMS resonators. Microelectron. J. 98: 104733 (2020)

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