"High-performance PIN photodiodes on TMAH thinned silicon wafers."

Gian-Franco Dalla Betta et al. (2008)

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DOI: 10.1016/J.MEJO.2008.04.009

access: closed

type: Journal Article

metadata version: 2020-02-22

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Gian-Franco Dalla Betta, S. Ronchin, A. Zoboli, Nicola Zorzi:
High-performance PIN photodiodes on TMAH thinned silicon wafers. Microelectron. J. 39(12): 1485-1490 (2008)

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