"Effects of precursor aging and post-deposition treatment time on ..."

Kuan Yew Cheong, F. A. Jasni (2007)

> Home

Details and statistics

DOI: 10.1016/J.MEJO.2006.11.011

access: closed

type: Journal Article

metadata version: 2020-02-22

- view
  - electronic edition via DOI
  - unpaywalled version
  authority control:
- export record
  dblp key:
  - journals/mj/CheongJ07
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/journals/mj/CheongJ07
Kuan Yew Cheong, F. A. Jasni:
Effects of precursor aging and post-deposition treatment time on photo-assisted sol-gel derived low-dielectric constant SiO₂ thin film on Si. Microelectron. J. 38(2): 227-230 (2007)

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.