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"H2 carrier gas dependence of Young's modulus and hardness of ..."
Gwiy-Sang Chung, Ki-Bong Han (2008)
- Gwiy-Sang Chung, Ki-Bong Han:
H2 carrier gas dependence of Young's modulus and hardness of chemical vapor deposited polycrystalline 3C-SiC thin films. Microelectron. J. 39(12): 1413-1415 (2008)
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