"Design and fabrication of a magnetic bi-stable electromagnetic MEMS relay."

Shi Fu et al. (2007)

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DOI: 10.1016/J.MEJO.2007.03.015

access: closed

type: Journal Article

metadata version: 2020-02-22

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Shi Fu, Guifu Ding, Hong Wang, Zhuoqing Yang, Jianzhi Feng:
Design and fabrication of a magnetic bi-stable electromagnetic MEMS relay. Microelectron. J. 38(4-5): 556-563 (2007)

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