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"Ultrathin insulating silica layers prepared from adsorbed TEOS, ..."

Jozef Kákos, Milan Mikula, Ladislav Harmatha (2008)

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DOI: 10.1016/J.MEJO.2008.02.008

access: closed

type: Journal Article

metadata version: 2020-02-22

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  - https://dblp.org/rec/journals/mj/KakosMH08
Jozef Kákos, Milan Mikula, Ladislav Harmatha:
Ultrathin insulating silica layers prepared from adsorbed TEOS, H₂O and NH₃ as a catalyst. Microelectron. J. 39(12): 1626-1628 (2008)

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